Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/27/2007
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Application #:
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10349092
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Filing Dt:
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01/23/2003
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Publication #:
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Pub Dt:
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08/14/2003
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Inventors:
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Tomohisa Konno, Masayuki Motonari, Masayuki Hattori, Nobuo Kawahashi
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Title:
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PROCESS FOR CHEMICAL MECHANICAL POLISHING OF SEMICONDUCTOR SUBSTRATE AND AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-24, TSUKIJI 2-CHOME |
| CHUO-KU, TOKYO 104-8410, JAPAN |
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| OBLON SPIVAK ET AL |
| 1940 DUKE ST |
| ALEXANDRIA VA 22314 |
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