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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7186943
Issue Dt:
03/06/2007
Application #:
11105307
Filing Dt:
04/12/2005
Publication #:
20050236377
Pub Dt:
10/27/2005
Inventors:
Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger JR., Xiaoye Zhao et al
Title:
MERIE PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA WITH ARCING SUPPRESSION
Assignment: 1
Reel/Frame:
016710/0759Recorded: 06/20/2005Pages: 17
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
HOFFMAN, DANIEL J.
Exec Dt:
10/07/2001
YE, YAN
Exec Dt:
10/22/2001
KATZ, DAN
Exec Dt:
10/09/2001
BUCHBERGER, DOUGLAS A., JR.
Exec Dt:
08/03/2001
ZHAO, XIAOYE
Exec Dt:
10/03/2001
CHIANG, KANG-LIE
Exec Dt:
10/17/2001
HAGEN, ROBERT
Exec Dt:
10/17/2001
MILLER, MATHEW
Exec Dt:
10/02/2001
Assignee:
APPLIED MATERIALS, INC.
P.O. BOX 450-A
LEGAL AFFAIRS DEPT., M/S 2061
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPT., M/S 2061
P.O. BOX 450A
SANTA CLARA, CA 95052

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