Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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10357664
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Filing Dt:
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02/03/2003
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Inventors:
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Fred C. Redeker, John M. Boyd, John Parks
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Title:
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METHOD AND APPARATUS FOR SEMICONDUCTOR WAFER CLEANING USING HIGH-FREQUENCY ACOUSTIC ENERGY WITH SUPERCRITICAL FLUID
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| KENNETH D. WRIGHT |
| MARTINE & PENILLA, LLP |
| 710 LAKEVIEW DRIVE, SUITE 170 |
| SUNNYVALE, CA 94085 |
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