Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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10428509
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Filing Dt:
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05/01/2003
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Publication #:
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Pub Dt:
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11/04/2004
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Inventors:
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Chi-Hsin Lo, Fei-Yun Chen
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Title:
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METHOD FOR POLYMER RESIDUE REMOVAL FOLLOWING METAL ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 6 LI-HSIN RD. 6 |
| SCIENCE BASED INDUSTRIAL PARK |
| HSIN-CHUN, TAIWAN, CHINA |
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| TUNG & ASSOCIATES |
| RANDY W. TUNG |
| 838 W. LOMG LAKE ROAD, SUITE 120 |
| BLOOMFIELD HILLS, MI 48302 |
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