Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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03/20/2007
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Application #:
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10670241
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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06/17/2004
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Inventors:
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Toshiya Asano, Yugo Shibata
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Title:
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ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| SCOTT D. MALPEDE |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, 3-CHOME, |
| OHTA-KU |
| TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| STEVEN E. WARNER |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2,SHIMOMARUKO, |
| OHTA-KU TOKYO, JAPAN |
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| FITZPATRICK, CELLA, |
| ET AL |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NY 10112-3801 |
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