Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/2007
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Application #:
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11178973
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Filing Dt:
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07/11/2005
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Publication #:
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Pub Dt:
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01/11/2007
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Inventors:
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Wolfgang R. Aderhold, Ali Zojaji
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Title:
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METHOD AND SYSTEM FOR DEPOSITION TUNING IN AN EPITAXIAL FILM GROWTH APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| PATENT COUNSEL |
| APPLIED MATERIALS, INC. |
| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450A, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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