Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/27/2007
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Application #:
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10512100
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Filing Dt:
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10/21/2004
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Publication #:
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Pub Dt:
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08/11/2005
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Inventors:
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Frank Melzer, Wolfgang Singer
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Title:
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LIGHTING SYSTEM, PARTICULARLY FOR USE IN EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CARL-ZEISS-STRASSE 22 |
OBERKOCHEN, GERMANY D-73447 |
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D. BRENT KENADY |
WELLS ST. JOHN P.S. |
601 WEST FIRST AVE. |
SUITE 1300 |
SPOKANE, WA 99201-3828 |
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