Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2007
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Application #:
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10948555
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Filing Dt:
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09/24/2004
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Publication #:
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Pub Dt:
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04/28/2005
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Inventors:
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Takumi Ota, Tetsuro Nakasugi
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Title:
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CORRECTION SYSTEM, METHOD OF CORRECTING DEFLECTION DISTORTION, PROGRAM AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| LLP |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001-4413 |
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