Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/17/2007
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Application #:
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09891833
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Filing Dt:
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06/25/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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Steven Verhaverbeke, J. Kelly Truman, Rick R. Endo, Alexander Ko
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Title:
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METHOD AND APPARATUS FOR CHEMICAL MIXING IN A SINGLE WAFER PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPT. |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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