Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2007
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Application #:
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10672311
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Filing Dt:
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09/26/2003
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Inventors:
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Adrianne K. Tipton, Brian G. Lu, Patrick A. Van Cleemput, Michelle T. Schulberg et al
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Title:
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METHOD OF POROGEN REMOVAL FROM POROUS LOW-K FILMS USING UV RADIATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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BEYEER WEAVER & THOMAS, LLP |
JEFFREY K. WEAVER |
P.O. BOX 778 |
BERKELEY, CA 94704-0778 |
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