Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/22/2007
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Application #:
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10820781
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Filing Dt:
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04/09/2004
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Publication #:
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Pub Dt:
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02/17/2005
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Inventors:
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Shunpei Yamazaki, Koichiro Tanaka, Hidekazu Miyairi
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Title:
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BEAM IRRADIATION APPARATUS, BEAM IRRADIATION METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 398, HASE ATSUGI-SHI |
| KANAGAWA-KEN, JAPAN 243-0036 |
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| ROBINSON INTEL PROPERTY LAW OFFICE |
| ERIC J. ROBINSON |
| 21010 SOUTHBANK STREET |
| PMB 955 |
| POTOMAC FALLS, VIRGINA 20165 |
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