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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/22/2007
Application #:
10421473
Filing Dt:
04/22/2003
Publication #:
Pub Dt:
10/28/2004
Inventors:
Andrew Nguyen, Wing Lau Cheng, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye et al
Title:
SUBSTRATE SUPPORT HAVING HEAT TRANSFER SYSTEM
Assignment: 1
Reel/Frame:
014011/0813Recorded: 04/22/2003Pages: 31
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/18/2003
Exec Dt:
03/19/2003
Exec Dt:
03/18/2003
Exec Dt:
03/19/2003
Exec Dt:
03/19/2003
Exec Dt:
04/21/2003
Exec Dt:
03/31/2003
Exec Dt:
03/17/2003
Exec Dt:
03/20/2003
Exec Dt:
04/13/2003
Assignee:
P.O. BOX 450-A
PATENT COUNSEL, M/S 2061
SANTA CLARA, CALIFORNIA 95052
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
PATENT COUNSE, M/S 2061
P.O. BOX 450-A
SANTA CLARA, CALIFORNIA 95052

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