Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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10866382
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Filing Dt:
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06/10/2004
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Inventors:
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Siyi Li, Helen H. Zhu, Howard Dang, Thomas S. Choi, Peter Loewenhardt
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Title:
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PREVENTING DAMAGE TO LOW-K MATERIALS DURING RESIST STRIPPING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| BEYER WEAVER & THOMAS LLP |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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