Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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11149568
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Filing Dt:
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06/10/2005
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Publication #:
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Pub Dt:
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12/01/2005
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Inventor:
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Paul Graeupner
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Title:
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METHOD FOR IMPROVING AN OPTICAL IMAGING PROPERTY OF A PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STR. 22 |
| OBERKOCHEN, GERMANY D-73447 |
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| ANDREW R. BASILE |
| YOUNG & BASILE, P.C. |
| 3001 WEST BIG BEAVER ROAD |
| SUITE 624 |
| TROY, MICHIGAN 48084-3107 |
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Assignment:
2
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| RUDOLF-EBER-STRASSE 2 |
| 73447 OBERKOCHEN, GERMANY |
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| TIMOTHY A. FRENCH |
| FISH & RICHARDSON P.C. |
| ONE MARINA PARK DRIVE |
| BOSTON, MASSACHUSETTS 02210-1878 |
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