Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/19/2007
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Application #:
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10505799
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Filing Dt:
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08/25/2004
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Publication #:
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Pub Dt:
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07/28/2005
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Inventors:
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Katsumi Maeda, Kaichiro Nakano
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Title:
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MONOMER HAVING FLUORINE-CONTAINING ACETAL OR KETAL STRUCTURE, POLYMER THEREOF, AND CHEMICAL-AMPLIFICATION-TYPE RESIST COMPOSITION AS WELL AS PROCESS FOR FORMATION OF PATTERN WITH USE OF THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1, SHIBA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 108-8001 |
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| HAYES SOLOWAY P.C. |
| NORMAN P. SOLOWAY |
| 130 W. CUSHING STREET |
| TUCSON, AZ 85701 |
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