Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/24/2007
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Application #:
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10767292
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Filing Dt:
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01/29/2004
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Publication #:
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Pub Dt:
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08/04/2005
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Inventors:
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Hai Cong, Yong Kong Siew, Liang Choo Hsia
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Title:
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NOVEL METHOD TO CONTROL DUAL DAMASCENE TRENCH ETCH PROFILE AND TRENCH DEPTH UNIFORMITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| STREET 2 |
| 60 WOODLANDS INDUSTRIAL PARK D |
| SINGAPORE 738406, SINGAPORE |
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| GEORGE O. SAILE |
| 28 DAVIS AVENUE |
| POUGHKEEPSIE, NY 12603 |
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