Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/07/2007
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Application #:
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10526933
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Filing Dt:
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03/08/2005
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Publication #:
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Pub Dt:
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07/27/2006
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Inventors:
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Yoichi Kobayashi, Shunsuke Nakai, Hitoshi Tsuji, Yasuo Tsukuda, Kazunari Shinya et al
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Title:
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POLISHING STATE MONITORING APPARATUS AND POLISHING APPARATUS AND METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO 144-8510, JAPAN |
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| 1, NISHINOKYO-KUWABARACHO, NAKAGYO-KU |
| KYOTO-SHI, KYOTO 604-8511, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| ATTN: NILS E. PEDERSEN, ESQ. |
| 2033 K STREET, N.W, SUITE 800 |
| WASHINGTON, DC 20006-1021 |
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