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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/18/2007
Application #:
11214252
Filing Dt:
08/29/2005
Publication #:
Pub Dt:
03/02/2006
Inventors:
Mitsuaki Amemiya, Masahito Shinohara
Title:
ALIGNMENT APPARATUS, EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
Assignment: 1
Reel/Frame:
016942/0252Recorded: 08/29/2005Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/23/2005
Exec Dt:
08/23/2005
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
MORGAN & FINNEGAN, L.L.P.
3 WORLD FINANCIAL CENTER
NEW YORK, NY 10281-2101

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