Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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11001218
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Filing Dt:
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11/30/2004
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Publication #:
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Pub Dt:
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08/11/2005
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Inventors:
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Neil Benjamin, Robert Steger
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Title:
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METHOD AND APPARATUS FOR CONTROLLING THE SPATIAL TEMPERATURE DISTRIBUTION ACROSS THE SURFACE OF A WORKPIECE SUPPORT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| THELEN REID & PRIEST LLP |
| P.O. BOX 640640 |
| SAN JOSE, CA 95164-0640 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-11, TAKINOGAWA 7-CHOME, KITA-KU |
| TOKYO, JAPAN |
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| MORGAN LEWIS & BOCKIUS LLP |
| 1111 PENNSYLVANIA AVENUE NW |
| WASHINGTON, DC 20004 |
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