Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/02/2007
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Application #:
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11057331
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Filing Dt:
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02/11/2005
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Publication #:
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Pub Dt:
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08/17/2006
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Inventor:
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Markus Kirsch
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Title:
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METHOD FOR AUTOMATICALLY PROVIDING DATA FOR THE FOCUS MONITORING OF A LITHOGRAPHIC PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ERNST-LEITZ-STRASSE 17-37 |
| WETZLAR, GERMANY D-35578 |
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| HOUSTON ELISEEVA |
| 4 MILITIA DRIVE, SUITE 4 |
| LEXINGTON, MA 02421 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| KUBACHER WEG 4 |
| WEILBURG, GERMANY 35781 |
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| MARIA ELISEEVA |
| 4 MILITIA DRIVE, SUITE 4 |
| LEXINGTON, MA 02421 |
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