Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/2007
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Application #:
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10886387
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Filing Dt:
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07/07/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Inventors:
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Gary X. Cao, George Chen, Brandon L. Ward, Nancy J. Wheeler, Alan Wong
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Title:
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CHARACTERIZING RESIST LINE SHRINKAGE DUE TO CD-SEM INSPECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BLVD. |
| SANTA CLARA, CALIFORNIA 95052 |
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| FISH & RICHARDSON P.C. |
| SCOTT C. HARRIS |
| 12390 EL CAMINO REAL |
| SAN DIEGO, CA 92130 |
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