Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/20/2007
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Application #:
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10060826
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Filing Dt:
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02/01/2002
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Publication #:
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Pub Dt:
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08/07/2003
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Inventors:
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Daniel S. Pickard, Ka-Ngo Leung
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Title:
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MATCHING NETWORK FOR RF PLASMA SOURCE
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Assignment:
1
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CONFIRMATORY LICENSE (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 808 (L-376) |
| LIVERMORE, CALIFORNIA 94550 |
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| U.S. DEPARTMENT OF ENERGY |
| WILLIAM C. DAUBENSPECK |
| LAWRENCE LIVERMORE NATIONAL LABORATORY |
| P.O. BOX 808 (MS L-376) |
| LIVERMORE, CALIFORNIA 94550 |
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