Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
12/04/2007
|
Application #:
|
10646467
|
Filing Dt:
|
08/22/2003
|
|
Publication #:
|
|
Pub Dt:
|
03/10/2005
| | | | |
|
Inventors:
|
Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Amir Al-Bayati et al
|
|
Title:
|
PLASMA IMMERSION ION IMPLANTATION PROCESS USING AN INDUCTIVELY COUPLED PLASMA SOURCE HAVING LOW DISSOCIATION AND LOW MINIMUM PLASMA VOLTAGE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
|
|
|
|
| APPLIED MATERIAL, INC. |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| LEGAL AFFAIRS DEPT. |
| SANTA CLARA, CA 95052 |
|
|
Search Results as of:
04/29/2024 10:14 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
