Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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01/08/2008
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Application #:
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10729838
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Filing Dt:
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12/05/2003
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Publication #:
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Pub Dt:
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09/02/2004
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Inventors:
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Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith, Michael Adel et al
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Title:
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APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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BEYER WEAVER & THOMAS, LLP |
MARY R. OLYNICK |
P.O. BOX 778 |
BERKELEY, CA 94704-0778 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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KWAN & OLYNICK LLP |
2000 HEARST AVENUE, SUITE 305 |
BERKELEY, CA 94709 |
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