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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/15/2008
Application #:
11537928
Filing Dt:
10/02/2006
Publication #:
Pub Dt:
02/22/2007
Inventors:
Li-Qun Xia, Ping Xu, Louis Yang
Title:
METHOD OF DEPOSITING LOW K BARRIER LAYERS
Assignment: 1
Reel/Frame:
018380/0950Recorded: 10/10/2006Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/29/2002
Exec Dt:
01/29/2002
Exec Dt:
02/16/2002
Assignee:
P.O. BOX 450-A
PATENT COUNSEL
SANTA CLARA, CALIFORNIA 95052
Correspondent:
PATTERSON & SHERIDAN, L.L.P.
APPLIED MATERIALS INC.
3040 POST OAK BOULEVARD, SUITE 1500
HOUSTON, TX 77056

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