Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/22/2008
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Application #:
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11237799
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Filing Dt:
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09/29/2005
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Publication #:
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Pub Dt:
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02/09/2006
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Inventors:
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Andrew J. Hazelton, Michael Sogard
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Title:
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ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| OLIFF & BERRIDGE, PLC |
| MARIO A. COSTANINO |
| P.O. BOX 19928 |
| ALEXANDRIA, VA 22320 |
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