Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/05/2008
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Application #:
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11076696
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Filing Dt:
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03/09/2005
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Publication #:
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Pub Dt:
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10/05/2006
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Inventors:
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Sandeep Mehta, Steven R. Walther, Naushad K. Variam
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Title:
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PLASMA ION IMPLANTATION SYSTEMS AND METHODS USING SOLID SOURCE OF DOPANT MATERIAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 35 DORY ROAD |
| GLOUCESTER, MASSACHUSETTS 01930 |
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| WILLIAM R. MCCLELLAN |
| WOLF, GREENFIELD & SACKS, P.C. |
| 600 ATLANTIC AVENUE |
| BOSTON, MA 02210-2206 |
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