Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/26/2008
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Application #:
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11045296
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Filing Dt:
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01/31/2005
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Publication #:
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Pub Dt:
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08/18/2005
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Inventors:
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Shoji Mimotogi, Daisuke Kawamura, Akiko Yamada
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Title:
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SIMULATOR OF LITHOGRAPHY TOOL FOR CORRECTING FOCUS ERROR AND CRITICAL DIMENSION, SIMULATION METHOD FOR CORRECTING FOCUS ERROR AND CRITICAL DIMENSION, AND COMPUTER MEDIUM FOR STORING COMPUTER PROGRAM FOR SIMULATOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| ERNEST F. CHAPMAN |
| FINNEGAN, HENDERSON, FARABOW, GARRETT |
| & DUNNER, L.L.P. |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, D.C. 20001-4413 |
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