Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/2008
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Application #:
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10760149
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Filing Dt:
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01/17/2004
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Publication #:
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Pub Dt:
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09/30/2004
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Inventors:
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Walter D. Mieher, Chris A. Mack, Matt Hankinson
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Title:
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METHOD FOR PROCESS OPTIMIZATION AND CONTROL BY COMPARISON BETWEEN 2 OR MORE MEASURED SCATTEROMETRY SIGNALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| BEYER WEAVER & THOMAS, LLP |
| QUIN C. HOELLWARTH |
| P.O. BOX 778 |
| BERKELEY, CA 94704-0778 |
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