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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/08/2008
Application #:
10150458
Filing Dt:
05/17/2002
Publication #:
Pub Dt:
11/20/2003
Inventors:
Sudhir Gondhalekar, Tom K. Cho, Tetsuya Ishikawa, Mehrdad Moshfegh, Shigeru Takehiro et al
Title:
UPPER CHAMBER FOR HIGH DENSITY PLASMA CVD
Assignment: 1
Reel/Frame:
013126/0402Recorded: 09/26/2002Pages: 22
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/15/2002
Exec Dt:
07/19/2002
Exec Dt:
07/18/2002
Exec Dt:
07/12/2002
Exec Dt:
09/19/2002
Exec Dt:
07/24/2002
Exec Dt:
07/12/2002
Exec Dt:
07/12/2002
Assignee:
PATENT DEPARTMENT
P.O. BOX 450A, M/S #2061
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
JAMES C. WILSON
P.O. BOX 450A, M/S 2061
PATENT DEPT.
SANTA CLARA, CA 95052

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