Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2008
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Application #:
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10624593
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Filing Dt:
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07/23/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Inventors:
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Kei Hayasaki, Shinichi Ito, Tomoyuki Takeishi, Kenji Kawano, Taksuhiko Ema
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Title:
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METHOD FOR FORMING A PATTERN AND SUBSTRATE-PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FINNEGAN, HENDERSON ET AL |
| MR. ERNEST F. CHAPMAN |
| 1300 I STREET, N.W. |
| WASHINGTON, D.C. 20005-3315 |
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