Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/27/2008
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Application #:
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11337603
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Filing Dt:
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01/24/2006
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Publication #:
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Pub Dt:
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08/03/2006
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Inventors:
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Masato Muraki, Hiroya Ohta
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Title:
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ABERRATION MEASURING APPARATUS FOR CHARGED PARTICLE BEAM OPTICAL SYSTEM, CHARGED PARTICLE BEAM LITHOGRAPHY MACHINE HAVING THE ABERRATION MEASURING APPARATUS, AND DEVICE FABRICATION METHOD USING THE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| 24-14, NISHISHINBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| FITZPATRICK, CELLA, HARPER & SCINTO |
| 30 ROCKEFELLER PLAZA |
| NEW YORK, NEW YORK 10112-3801 |
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Assignment:
2
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CHANGE OF NAME AND ADDRESS
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| 17-1, TORANOMON 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MATTINGLY & MALUR PC |
| 1800 DIAGONAL ROAD |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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