Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11318269
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Filing Dt:
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12/23/2005
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Inventors:
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Pramod Subramonium, Zhiyuan Fang, Jon Henri
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Title:
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PULSED PECVD METHOD FOR MODULATING HYDROGEN CONTENT IN HARD MASK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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BEYER WEAVER & THOMAS, LLP |
P.O. BOX 70250 |
OAKLAND, CA 94612-0250 |
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