Patent Assignment Abstract of Title
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Total Assignments:
4
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11386327
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Filing Dt:
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03/22/2006
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Publication #:
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Pub Dt:
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09/27/2007
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Inventors:
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Palanikumaran Sakthivel, Thomas J. Buckley, Alan F. Becknell
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Title:
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PROCESSES FOR MONITORING THE LEVELS OF OXYGEN AND/OR NITROGEN SPECIES IN A SUBSTANTIALLY OXYGEN AND NITROGEN-FREE PLASMA ASHING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| CANTOR COLBURN LLP |
| 55 GRIFIN ROAD SOUTH |
| BLOOMFIELD, CT 06002 |
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Assignment:
2
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 2001 JEFFERSON DAVIS, HWY., SUITE 1007 |
| ARLINGTON, VA 22202 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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Assignment:
4
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TERMINATION OF SECURITY AGREEMENT
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01905 |
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| THOMAS FAHEY |
| NATIONAL CORPORATE RESEARCH, LTD. |
| 1100 G STREET NW, SUITE 420 |
| WASHINGTON, DC 20005 |
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