Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/08/2008
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Application #:
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10953801
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Filing Dt:
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09/30/2004
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Publication #:
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Pub Dt:
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03/30/2006
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Inventors:
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Lee Chen, Hiromitsu Kambara, Caiz Hong Tian, Tetsuya Nishizuka, Toshihisa Nozawa
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Title:
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PLASMA PROCESSING SYSTEM FOR TREATING A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER ET AL |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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RE-RECORD TO CORRECT THE NAME OF THE THIRD ASSIGNOR, PREVIOUSLY RECORDED ON REEL 016184 FRAME 0277.
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL |
| 1940 DUKE STREET |
| ALEXANDRIA, VIRGINIA 22314 |
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