Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2008
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Application #:
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11151696
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Filing Dt:
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06/13/2005
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Publication #:
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Pub Dt:
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02/23/2006
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Inventors:
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Guy Cheymol, Philippe Cormont, Pierre-Yves Thro, Olivier Sublemontier, Martin Schmidt et al
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Title:
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APPARATUS FOR GENERATING LIGHT IN THE EXTREME ULTRAVIOLET AND USE IN A LIGHT SOURCE FOR EXTREME ULTRAVIOLET LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 31-33 RUE DE LA FEDERATION |
| 75015 PARIS, FRANCE |
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| 12 RUE DE LA BAUME |
| 75008 PARIS, FRANCE |
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| WEINGARTEN, SCHURGIN, GAGNEBIN |
| & LEBOVICI LLP |
| TEN POST OFFICE SQUARE |
| BOSTON, MASSACHUSETTS 02109 |
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