Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/2008
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Application #:
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10209585
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Filing Dt:
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07/30/2002
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Inventors:
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Thomas J. Sonderman, Richard J. Markle
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Title:
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PLASMA STATE MONITORING TO CONTROL ETCHING PROCESSES AND ACROSS-WAFER UNIFORMITY, AND SYSTEM FOR PERFORMING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS, MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 7676 HILLMONT |
| SUITE 250 |
| HOUSTON, TX 77040 |
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