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Patent Assignment Abstract of Title
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Total Assignments: 4
Patent #:
Issue Dt:
08/12/2008
Application #:
11150698
Filing Dt:
06/11/2005
Publication #:
Pub Dt:
12/15/2005
Inventors:
Allen R. Kirkpatrick, Sean Kirkpatrick, Martin D. Tabat, Thomas G. Tetreault et al
Title:
FORMATION OF DOPED REGIONS AND/OR ULTRA-SHALLOW JUNCTIONS IN SEMICONDUCTOR MATERIALS BY GAS-CLUSTER ION IRRADIATION
Assignment: 1
Reel/Frame:
016925/0657Recorded: 08/29/2005Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Exec Dt:
07/22/2005
Assignee:
37 MANNING ROAD
BILLERICA, MASSACHUSETTS 018212
Correspondent:
JERRY COHEN, ESQ.
PERKINS, SMITH & COHEN, LLP
ONE BEACON STREET
BOSTON, MA 02108
Assignment: 2
Reel/Frame:
019536/0001Recorded: 07/10/2007Pages: 6
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
12/18/2006
Assignee:
37 MANNING ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondent:
DAVID W. GOMES
BURNS & LEVINSON LLP
125 SUMMER STREET
BOSTON, MA 02110
Assignment: 3
Reel/Frame:
019534/0258Recorded: 07/10/2007Pages: 11
Conveyance:
NUNC PRO TUNC ASSIGNMENT (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/29/2007
Exec Dt:
06/29/2007
Exec Dt:
07/02/2007
Exec Dt:
06/29/2007
Exec Dt:
06/27/2007
Exec Dt:
06/29/2007
Exec Dt:
06/29/2007
Assignee:
37 MANNING ROAD
BILLERICA, MASSACHUSETTS 01821
Correspondent:
DAVID W. GOMES
BURNS & LEVINSON LLP
125 SUMMER STREET, MA 02110
Assignment: 4
Reel/Frame:
051843/0245Recorded: 02/07/2020Pages: 17
Conveyance:
MERGER (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
01/01/2020
Assignee:
3455 LYMAN BLVD.
CHASKA, MINNESOTA 55318
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD
AUSTIN, TX 78741

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