Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/12/2008
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Application #:
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11391378
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Filing Dt:
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03/29/2006
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Publication #:
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Pub Dt:
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11/16/2006
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Inventors:
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Richard A. Gontin, Yuli Vladimirsky
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Title:
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SPECKLE REDUCTION METHOD AND SYSTEM FOR EUV INTERFEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
DR VELDHOVEN, NETHERLANDS NL-5504 |
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STERNE KESSLER GOLDSTEIN & FOX PLLC |
C/O DONALD J. FEATHERSTONE |
1100 NEW YORK AVENUE, N.W. |
WASHINGTON, DC 20005-3934 |
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