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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/19/2008
Application #:
10607606
Filing Dt:
06/27/2003
Inventors:
Ramesh Gopalan, Sridharan Srivatsan, Katgenhalli Y. Ramanujam, Tom Ni, Conan Chiang
Title:
METHOD AND APPARATUS FOR DETECTING PLANARIZATION OF METAL FILMS PRIOR TO CLEARING
Assignment: 1
Reel/Frame:
014354/0496Recorded: 06/27/2003Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/25/2003
Exec Dt:
06/25/2003
Exec Dt:
06/25/2003
Exec Dt:
06/26/2003
Exec Dt:
06/25/2003
Assignee:
4650 CUSHING PARKWAY
FREMONT, CALIFORNIA 94538
Correspondent:
MARTINE & PENILLA LLP
MICHAEL L. GENCARELLA
710 LAKEWAY DRIVE, SUITE 170
SUNNYVALE, CA 94085

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