Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/19/2008
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Application #:
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10677242
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Filing Dt:
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10/03/2003
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Publication #:
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Pub Dt:
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04/07/2005
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Inventor:
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Peter Kochersperger
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Title:
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METHOD AND SYSTEMS FOR TOTAL FOCUS DEVIATION ADJUSTMENTS ON MASKLESS LITHOGRAPHY SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 1100 |
| LA VELDHOVEN, NETHERLANDS 5503 |
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| STERN, KESSLER, GOLDSTEIN & FOX P.L.L.C. |
| DONALD J. FEATHERSTONE |
| 1100 NEW YORK AVE., N.W. |
| WASHINGTON, DC 20005-3934 |
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