Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/26/2008
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Application #:
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11196402
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Filing Dt:
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08/04/2005
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Publication #:
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Pub Dt:
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12/08/2005
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Inventors:
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Masafumi Ito, Yasuyuki Okamura, Tatsuo Shiina, Nobuo Ishii, Tomohiro Suzuki et al
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Title:
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METHOD AND APPARATUS FOR MEASURING TEMPERATURE OF SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-096, 5-17, RINKU-PORT KITA, TAJIRI-CHO |
| SENNAN-GUN, OSAKA, JAPAN 598-0093 |
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| OBLON, SPIVAK, MCCLELLAND, MAIER & NEUST |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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