Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2008
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Application #:
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11273021
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Filing Dt:
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11/15/2005
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Publication #:
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Pub Dt:
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12/28/2006
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Inventor:
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Keiichi Tanaka
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Title:
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SUBSTRATE CONVEYOR APPARATUS, SUBSTRATE CONVEYANCE METHOD AND EXPOSURE APPARATUS
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-3 MARUNOUCHI 3-CHOME, CHIYODA-KU |
TOKYO, JAPAN 100-8331 |
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MR. MICHAEL R. KELLY |
FINNEGAN HENDERSON FARABOW GARRETT & |
DUNNER, LLP |
901 NEW YORK AVE., NW |
WASHINGTON, DC 20001-4413 |
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