Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/30/2008
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Application #:
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10449539
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Filing Dt:
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05/29/2003
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Publication #:
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Pub Dt:
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09/16/2004
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Inventors:
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Alon Litman, Igor Krivts
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Title:
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ELECTROSTATIC CHUCK FOR WAFER METROLOGY AND INSPECTION EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP |
| TAREK N. FAHMI |
| 12400 WILSHIRE BOULEVARD, 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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