Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/07/2008
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Application #:
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11386428
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Filing Dt:
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03/22/2006
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Publication #:
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Pub Dt:
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09/27/2007
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Inventors:
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Gerardo A. Delgadino, Richard Hagborg, Douglas A. Buchberger JR.
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Title:
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PLASMA DIELECTRIC ETCH PROCESS INCLUDING IN-SITU BACKSIDE POLYMER REMOVAL FOR LOW-DIELECTRIC CONSTANT MATERIAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450A |
| LEGAL AFFAIRS DEPT. M/S 2061-LEGAL |
| SANTA CLARA, CALIFORNIA 95052 |
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| ROBERT M. WALLACE |
| LAW OFFICE OF ROBERT M. WALLACE |
| 2112 EASMAN AVENUE, SUITE 103 |
| VENTURA, CA 93003 |
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