Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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11103041
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Filing Dt:
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04/11/2005
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Publication #:
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Pub Dt:
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10/27/2005
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Inventor:
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Akira Miyake
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Title:
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EXPOSURE APPARATUS USING BLAZE TYPE DIFFRACTION GRATING TO DIFFRACT EUV LIGHT AND DEVICE MANUFACTURING METHOD USING THE EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-30-2. SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| MORGAN & FINNEGAN, L.L.P. |
| 3 WORLD FINANCIAL CENTER |
| NEW YORK, NY 10281-2101 |
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