Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2008
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Application #:
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10928466
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Filing Dt:
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08/26/2004
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Publication #:
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Pub Dt:
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03/02/2006
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Inventors:
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Yi Zheng, Howard Zolla, Nian-Xiang Sun, Hamid Balamane
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Title:
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METHODS AND SYSTEMS OF ENHANCING STEPPER ALIGNMENT SIGNALS AND METROLOGY ALIGNMENT TARGET SIGNALS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LOCATELLIKADE 1 |
| PARNASSUSTOREN |
| 1076 AZ AMSTERDAM, NETHERLANDS |
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| HITACHI GLOBAL STORAGE TECHNOLOGIES |
| INTELLECTUAL PROPERTY LAW |
| 5600 COTTLE ROAD, DEPT. |
| NHGB/014-2 |
| SAN JOSE, CA 95193 |
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