Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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11205992
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Filing Dt:
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08/18/2005
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Publication #:
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Pub Dt:
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12/08/2005
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Inventors:
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Koji Nozaki, Masayuki Takeda
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Title:
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ETCH-RESISTANT FILM, FORMING METHOD THEREOF, SURFACE-MODIFIED RESIST PATTERN, FORMING METHOD THEREOF, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, KAMIKODANAKA 4-CHOME, NAKAHARA-KU |
| KAWASAKI-SHI, KANAGAWA 211-8588, JAPAN |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN, LL |
| 1250 CONNECTICUT AVENUE, NW |
| SUITE 700 |
| WASHINGTON, DC 20036 |
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