Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/09/2008
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Application #:
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11328179
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Filing Dt:
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01/10/2006
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Publication #:
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Pub Dt:
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06/01/2006
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Inventors:
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Wenceslao A. Cebuhar, Jason D. Hintersteiner, Azat Latypov, Gerald Volpe
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Title:
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USING TIME AND/OR POWER MODULATION TO ACHIEVE DOSE GRAY-SCALING IN OPTICAL MASKLESS LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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DE RUN 6501 |
NL - 5504 DR VELDHOVEN, NETHERLANDS |
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STERNE, KESSLER, GOLDSTEIN & FOX, PLLC |
1100 NEW YORK AVENUE, N.W. |
WASHINGTON, DC 20005 |
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