Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/2009
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Application #:
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11924433
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Filing Dt:
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10/25/2007
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Inventor:
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Harald Herchen
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Title:
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METHOD AND APPARATUS FOR DETECTING SUBSTRATE TEMPERATURE IN A TRACK LITHOGRAPHY TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU |
| SHIMOGYO-KU, KYOTO, JAPAN 600-8009 |
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| JENNIFER SMOLEN |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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